# CLEANROOM NOTES

### REFERENCE VIDEOS

**Cleanroom Training Video**
{%youtube Um0VA6iycY4 %}

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**Cleanroom HVAC Design Webinar**
{%youtube cLpy5sVZDKI%}

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**Applied Psychrometrics Webinar**
{%youtube MmyrjDMlpyo%}

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**Cleanroom Basics**
{%youtube LKKO4bQz9Cs%}

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**Cleanrooms and Controlled Environments - Trends, Tools, and Technologies**
{%youtube h22O8EdQMng%}

**Cleanroom HVAC Systems Design**
{%youtube 5XzNhdrJEhQ%}

## Intro

**Cleanroom** is a special enclosed area employing control over the particulate matter in air with temperature, humidity and pressure control as required.

To meet the requirements of a "cleanroom" as defined by this standard, all cleanrooms must not exceed a particulate count as specified in the air cleanliness class.

(Video: Cleanroom HVAC Design Webinar)


**Cleanroom Applications**

(Video: Cleanrooms and Controlled Environments - Trends, Tools, and Technologies)


### Cleanroom Classification

Ada beberapa klasifikasi Cleanroom yang telah dibuat, namun yang paling terkenal adalh klasifikasi oleh **ISO** dan **STD 209E** (STD 209 sudah tidak dipakai sejak 2009, sehingga lebih dipakai ISO)

(Video: Cleanrooms and Controlled Environments - Trends, Tools, and Technologies)


**ISO 14644-1 and ISO 14698**

Dua klasifikasi ini merupakan standar yang dibuat oleh International Organization for Standarization (ISO)

(Wikipedia: Cleanroom)

Sedangkan klasifikasi yang dibuat oleh pemernitah AS (US Federal) lebih dikenal sebagai **US FED STD 209E**

**US FED STD 209E**

(Wikipedia: Cleanroom)

**Particle Sources & Control**

(Video: Cleanroom HVAC Design Webinar)


### Airborne Particle Physical controls

(Video: Cleanroom HVAC Design Webinar)


**Typical Ceiling Filter Coverage**

(Video: Cleanroom HVAC Design Webinar)


**Room Airflow Volume/Quantity**

(Video: Cleanroom HVAC Design Webinar)

(Traditional Approaches: Table Methods)
Tabel ini hanya digunakan sebagai gambaran, namun tidak bisa dijadikan acuan karena tidak perlu ada penelitian lebih lanjut


### Room airflow Patterns

(Video: Cleanroom HVAC Design Webinar)


**Pressurization**

(Video: Cleanroom HVAC Design Webinar)


**Why Do particles Migrate (exchange) Between Cleanroom and Adjacent Area(s)?**

(Video: Cleanroom HVAC Design Webinar)


**Particles Concentration**

(Video: Cleanroom HVAC Design Webinar)


(Video: Cleanroom HVAC Design Webinar)


**Dynamic Particle Migration Control (Airlock)**

(Video: Cleanroom HVAC Design Webinar)

Airlock is an intermediate room between adjacent areas with different cleanliness to minimize particles, microbial and/or fume migrations


**How To Select An Airlock**

(Video: Cleanroom HVAC Design Webinar)


**Analogy Between Filter and Airlock Performance**

(Video: Cleanroom HVAC Design Webinar)


### HVAC Diagrams

**For (ISO Class 7,8,9) or (FS-209 Class 10.000,100.000)**


**For (ISO Class 4,5,6,7) or (FS-209 Class 10,100,1000,10.000)**


**For (ISO Class 1,2,3,4) or (FS-209 Class 1,10)**


#### Perbedaan antara HVAC yang digunakan untuk ruangan biasa dan Cleanroom


* Cleanrooms often require **higher** airflow rates when diluting room air in order to lower particle concentrations. its airflow rate vs cooling load ratio is higher, or much higher than those for commercial spaces.
* For ISO Class 6 or cleaner cleanrooms, the flow rate/cooling ratio maybe beyond the reach that a single AHU unit can handle to avoid a mismatch.
* Mismatch design (higher airflow rate to a relative smaller cooling load) could cause a cooling coil to have *sensible cooling only without latent heat removal which may result in poor humidity control* inside cleanrooms.
* Typical core configurations of air-handling loops with many variations: Primary Loop, primary-Secondary Loops, primary-Secondary-Tertiary Loops.

#### Air Handling Units Coniguration

**For ISO Class 7,8,9**




**For ISO Class 4,5,6**



**For ISO Class 1,2,3,4**


**For ISO Class 1,2,3,4,5,6,7**


**Pressurized Plenum (Fan Tower) Arrangement**


**Fan Filters Units (FFU) Arrangement**


### Common Filters Used in Cleanrooms
HEPA filter (High Efficiency Particle Air), has 99.97% efficient on a 300 nm particle

ULPA filter (Ultra Low Penetration Air), has 99.999% efficient in a 100 nm particle

HEPA and ULPA filters cannot remove gasses or odors, HEPA rated as ISO Class 5 and ULPA rated as ISO Class 3

## Filtration Mechanism

(Reference: https://www.air-quality-eng.com/air-cleaners/filtration-mechanisms/)

There are **5 mechanisms air filtration**

- [ ] **Sieving/Straining** is the common intuitive mechnism of particle removal. Particles larger than the gap between fibers are trapped.
**N.B**: Since particles of concern in cleanrooms are submicron and the gaps between fibers in most media are often larger than this size, sieving is not domonant mechnism of partcile removal

**(Sieving/Straining Mechanism)**

- [ ] **Inertial impaction** occurs when particles in the air stream are unable to stay with the air stream as air flows around fibers and seperate from it, impacting fiber.
Particles at a certain velocity tend to remain at velocity and travel in a continuous direction. This principle is normally applied when there is a high concentration of coarse particulate, and in many cases as pre-filtration mode to higher efficiency final filters.

**(Inertial Impaction)**

- [ ] **Interception** involves having the particulate make physical contact and becoming attached to the media fiber.
The particulate which is intercepted is smaller and its inertia is not strong enough to cause the particle to continue in a straight line. It, therefore, follows the air stream until it comes into contact with a fiber.

**(Interception)**

- [ ] **Diffusion** occurs due to the rapid and random motion due to the their internal thermal energies, also known as *Brownian motion*. As these small particles flow with the air air stream, their rapid random motion can bring them in contact with the fiber, and are collected. this random motion increases with decreasing sizes.
**N.B**: Since sub micron particles are of main concern in cleanrooms, particle removal is considered to be diffusion dominated in cleanroom filters

**(Diffusion)**

- [ ] **Electrostatic Attraction** also called electrostatic precipitation involves utilizing ionizing wires to induce a charge on the particulates. The charged particles are attracted to oppositely-charged collection plates, while the purified air is returned to the ambient area.
Electrostatic is used for removing fine particulates such as dust and smoke.

**(Electrostatic Attraction)**

**N.B:** Most air cleaners will employ a combination of the listed mechanisms for any given application. This may be accomplished by combining a pre-filter, a main filter and sometimes, a post-filter.

### [Psychrometric Charts](https://hackmd.io/TdaqXNs-SfOUiuAcEgxHQQ#Pshycometric-Chart)