Jackie Tung
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    --- tags: Instruction --- # CM300xi-SiPh instruction ![CM300xi](https://i.imgur.com/BY6sJBL.png) # Table of contents [toc] --- # Instrument ```sequence CM300xi -> CM300xi ctrl PC: Ctrl command Light source (LS)->Light: LS ctrl PC->CM300xi ctrl PC: Ctrl command LS ctrl PC-->User PC: Data transfer LS ctrl PC->Light source (LS): Polarization LS ctrl PC->Light source (LS): Ctrl command User PC->LS ctrl PC: Auto ctrl command ``` ## **CM300xi-SiPh \[CM3]** (300 mm SiPh Probe Station) ### **Software** **FFI Photonics Controller Interface \[PCI]** ![PCI](https://i.imgur.com/1eJgq6C.jpg) * Controls manual positioning, scan parameters, initial optical alignment, etc. * **Tabs**: **Main/display**, **Scan Parameters**, etc. * **Power meter** **SiPh-tools \[SPT]** ![SiPh-tools](https://i.imgur.com/icb69Me.jpg) * Probe position control * **Tabs**: **Probe Control**, log, etc. * **Output Z controls** **Velox \[VLX]** * Probe Station Control Software * **Wafer mapping** **Scripting Console \[SPC]** * Stop \[SPT] ### **Hardware** * Fiber array, Fiber/Array Holders, Reconfigurable Fiber Arm * RF Probing * eVue Digital Imaging System * Thermal Systems ## **T100S-HP \[T10]** (Tunable Laser) & **CT440** (Optical Component Tester) ### **Software** **CT440 \[CT4]** ### **Hardware** * **Default setting**: $\lambda = 1310$ (nm), $P = 1.0$ (mW), $I = 39.4$ (mA) ## **PSY-201 \[PSY]** (Polarization Synthesizer) ### **Software** **PolaView** ### **Hardware** ## RF Probing (?) * To be done --- # Fiber array setup * 1DGC * 2DGC * 12MMI * 22MMI * MRM * PD --- # Light calibration ```python= def LIGHT_CAL_MANL(): [CT4] Fiber.Docking(input, output1) # Cali.channel(1) [CT4] CT4.run() [CT4] Calibration() [CT4] Calibration.reset() [CT4] Calibration.Cali(1) [CT4] Fiber.Docking(input, output2) # Cali.channel(2) [CT4] Calibration.Cali(2) [CT4] Check.Update("C:\Users\Public\Documents\Yenista Optics\CT440\Calib\FileYO181010144.dat") [CT4] Cali_file.Backup("C:\Users\fengyuan\Calib\FileYO181010144.dat") def LIGHT_CAL_AUTO(): [1zq] CT440_calibration.py [1zq] Fiber.Docking(input, output1) # Cali.channel(1) [1zq] ENTER [1zq] Fiber.Docking(input, output2) # Cali.channel(2) [1zq] ENTER [1zq] Check.Update("C:\Users\Public\Documents\Yenista Optics\CT440\Calib\FileYO181010244.dat") [1zq] Cali_file.Backup("C:\Users\fengyuan\Calib\FileYO181010244.dat") ``` --- # Wafer loading ```python= def WAFER_LOADING(): if [PCI] restart: [PCI] Reload("Wafer map") # otherwise Z might be locked else: pass [SPT] Output_Probe_Probe_Z_height(>=500) # prevent probe crush [VLX] CtrlCenter_Chuck.Z_Setup("Separation height") [VLX] Toolbar.Move_to("Chuck load position") [CM3] Door.open() [CM3] Wafer.load() [CM3] Wafer.align() [CM3] Wafer.fix("suck") [CM3] Door.close() [VLX] Toolbar.Move_to("Chuck load position") [VLX] CtrlCenter_Chuck.Z_Setup("Separation height") ``` --- # Wafer alignment ```python= def WAFER_ALN(): [VLX] Find_Target_Pattern() [VLX] Auto_Align() [VLX] Auto_Align.Train() [VLX] Auto_Align.Train("Zoom in") # needs to preserve enough outside info of pattern [VLX] Auto_Align_Wizard("Train Light Settings"==True, "Use Current Index Size"==False, "Calculate Die Size"==True) ![VLX] Toolbar.set_home() ![VLX] Toolbar.set_home("Set") # [VLX] CtrlCenter_Chuck.Z_Setup("Contact height") ``` --- # Light alignment ```python= def LIGHT_ALN(): # check light status [PCI] Find_standard("Standard device") # 1DGC_2066 [PCI] Scan_Parameters.NanoAreaScanPara(all=50, step_spacing=0.1) # Scan_Parameters might changed after disscuss with NV [SPT] Output_Probe_XY_Controls(X+=500) # not to block the device [VLX] Select_Lens(Magnification==Lowest) # otherwise SPT might crash [SPT] Train.Output_HOM() [SPT] Select_target("Down-left of fiber array") [SPT] Train.Output_HOM(X=250, Y=750) [SPT] Select_target("Device") # check device position in VLX [SPT] Train.Output_HOM("Yes") # always check λ == 1310 before any action [T10] Set_λ(1310) # lower the probe for i in range(step_need_for_z_align): if [SPT] Z_position == "out of range": [SPT] Z_position = Output_Probe_Z_Controls(+200) elif [SPT] 200 >= Z_position > 100: [SPT] Z_position = Output_Probe_Z_Controls(+100) elif [SPT] 100>= Z_position > 50: [SPT] Z_position = Output_Probe_Z_Controls(+50) elif [SPT] 50 >= Z_position > 10: [SPT] Z_position = Output_Probe_Z_Controls(+10) else: [SPT] Z_position = Output_Probe_Z_Controls(+1) # when Z_position is not as lower as expected, probe is close to wafer if [SPT] ΔZ_position << Output_Probe_Z_Controls(input_value): break else: continue [SPT] Calibrate.outputZ.offset(Z=0) [SPT] Find(Z=20) # find light [T10] Set_λ(1310) # always check λ == 1310 before any action [PCI] Search_First_Light.Output_Side() [PCI] Area_Scan.Out_Nano() # [PCI] Graient_Scan.Out_Nano(), might changed after disscuss with NV if [PCI] Power Meter << -30: [SPT] Re_train_HOM() or LIGHT_CAL() else: [SPT] Output_Probe_XY_Controls("Set") ``` --- # Manual Meas. ```python= # Check Master/Slave Mode if Mode(Slave) == True: [SPC] Run_script("StopSiPTools") [SPT] Mode = "Master Mode" [SPT] Initialized() else: pass # Check Wafer status if Wafer.exist==False or Wafer.change==True: [VLX] WAFER_LOADING() [VLX] WAFER_ALN() else: pass # Check Calibration (MANL) # Always check λ == 1310 before any action if Calibration(need) == True: [CT4] LIGHT_CAL_MANL() else: pass # Check light status # Always check λ == 1310 before any action [VLX] CtrlCenter_Chuck.Z_Setup("Contact height") [SPT] LIGHT_ALN() # Start Meas. # # Always check λ == 1310 before any action # 1DGC 12 (1I 2O) # 2DGC # 12MMI # 22MMI # MRM 231 (2I 13O) # PD ``` --- # Automation Meas. ```python= # Check Master/Slave Mode # An example start from the very first biginning of Meas. if Mode(Slave) == True: [SPC] Run_script("StopSiPTools") [SPT] Mode = "Master Mode" [SPT] Initialized() else: pass # Check Wafer status if Wafer.exist==False or Wafer.change==True: [VLX] WAFER_LOADING() [VLX] WAFER_ALN() else: pass # Check Calibration # Always check λ == 1310 before any action if Calibration(need) == True: [CT4] LIGHT_CAL_MANL() else: pass # Check light status # Always check λ == 1310 before any action [VLX] CtrlCenter_Chuck.Z_Setup("Contact height") [SPT] LIGHT_ALN() # Change to AUTO Meas. [CT4] Close() # Check Master/Slave Mode if Mode(Master) == True: [SPT] Mode = "Slave Mode" [SPT] Initialized() else: pass # Calibration (AUTO) [1zq] LIGHT_CAL_AUTO() # AUTO Meas. start [1zq] CT440_PDL_run.Start() ![VLX] Select_Die() [7mu] xMeasure2_SiPh.run() [xM2] xMeasure2_SiPh.Setting() [xM2] xMeasure2_SiPh.Setting.Modified() [xM2] xMeasure2_SiPh.Setting("OK wi eck Hardware") [xM2] xMeasure2_SiPh.DeviceTables() [xM2] xMeasure2_SiPh.File.Load(".tab") [xM2] xMeasure2_SiPh.Table.modified() [xM2] xMeasure2_SiPh.Confirm() ![xM2] xMeasure2_SiPh.Measure() ![xM2] xMeasure2_SiPh.MappingMeasure() ``` --- ## FFI Photonics Controller Interface (PCI) * Set area scan (step: 0.1um) * Search First Light &rarr; Output Side * Area Scan &rarr; Out Nano * Power Meter Chart (1DGC 2066 loss ≈ -30dB) ## SiPh_tools (Matlab-based) * **Slave Mode** &uarr; Initialized * **Train** &rarr; output **HOM** (X: **250um**, Y: **750um**) &rarr; Select target * Output Probe Z Controls (&uarr; 50um &rarr; **Find 20um**) * After PCI Out Nano &rarr; Output Probe XY Controls &rarr; **Set** --- # Data transfer * Most data is in **.csv** format * Defalt directory: * **./CT440_client/CT440_Meas/fengyuan** * Folder format: * **time_device_purpose** * Ex: 230422_1DGC_test * Compress the folder into zip files (**.7z, 25MB**) ## File transfer ### **Sender \[1zq]** **NIMAX** &rarr; NI PCIe GPIB**1** &rarr; Interactive ctrl ```console= GPIB1: ibfind gpib1 gpib1: ibwrtf D:\zip\file\directory (wait for receiver ready & confirm) (Enter) ``` ### **Receiver \[7mu]** **NIMAX** &rarr; NI PCIe GPIB**0** &rarr; Interactive ctrl ```console= GPIB0: ibfind dev1 dev1: ibrdf D:\zip\file\directory (Enter) ```

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