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    20210313情境B 尚未解決疑問: 若可在Site-1裡解決為何要到別的Site。(ANS:Change Recipe Cost) Foop經過的路徑為何(例:機台->暫存區->天車->機台?) 晶圓作業大概時間? Storage carrier可以1-1 stocker或是1-多 stocker? 問題假設: 一、 蝕刻2 Current From 目的地為別的Site 二、 情境B JOB = Foup(20 or 25片晶圓) 三、 情境A Ave. Wafer Output / hr = 一台Stocker平均產出wafer數 四、 更動目的地(暫時不管,無法定義) 說明: queued的foop在stocker,不在OHT上 current的在OHT上運送 問題說明及情境分析: 一、82-11 = 71台OHT分配給Queued、Delay、改變目的地... 二、因蝕刻1(Bay8、Bay1)的Occupancy Ratio偏高,且根據情境A表格數據顯示,顯影Scanner的生產效率比蝕刻1高,且機台數更多,因此在蝕刻1的部分一定會塞車。 預期效益: HI~ A0 應該是要先弄懂那些製程在幹嘛 然後設計一個可以讓派工順暢的方法。猜的。 Q1 我們現在選擇情境B,輔以情境A的參數作為參考。首先情境A的(1-ave.availability)是指在change recipe或是cold down嗎?下面的ave. wafer output/hr 是「考慮上面三列條件」所平均出來「每部機台」或是「每項製程」的每小時wafers? 因為網路上找不到晶圓在各製程的作業時間,只知道一筆訂單應該要兩三個月才能完成,所以很難估算。 A1 availiability 應該不只有change recipe跟cold down, 還有一些其他人為維護機台也會影響。一筆訂單由多組製程完成,通常有上千道製程,可以想像成很多個stock。 Q2 情境B題目說明中提到執行中有359個job,我們看出來是右上方四列表格加總;Queued兩列加總則是排隊準備執行的233個job數量,而被終止、已延遲與待更動目的地的job數都從右方的表格中卻看不出來,不曉得這些有隱藏在表格中的數字之間的嗎? A2 感覺要從從表格上的四個from/to/current/delay kpi仔細推敲,應該會比可以算出題目上的終止跟延遲的數據。方向應該是他表格上的數據是某一個特定時間的狀態,下一秒表格上的數據應該會轉換。 Q3 目前我們大致了解晶圓在前段製程是需要重複經歷這四大項程序,但不了解的是每經過一次loop後是不是要更換一次recipe?這可能就是解釋為何同屬於PR的Bay1與Bay3的Current To為0,也同時要假設ETCH2製作完成的CurrentTO應該都是要送往別的廠區? A3 可以想像成做完一次jobs就會更換recipe。ETCH2做完會到量測站(題目沒列出他的目的地時間先假設去別場了),之後再重PR那段開始。 Q4 情境B右下角的表格也讓我們有些疑惑。同為ETCH1的Bay8與Bay10所配置的Storage Carrier及Storage Upper Limit比例非常奇怪。配合情境A的產能比較表,推論ETCH1一定會塞車,但目前還沒有理由解釋為何這樣配置。成大的這篇論文中有引用2000年的一篇期刊,說到晶圓倉儲使用率上限約為70%,個別晶圓倉儲使用率超過上限則需要第二座晶圓倉儲。可惜這篇論文好像被刪掉了,各大院校的系統都找不到,即使破解付費網站也被導引到別篇,所以沒法從原文理解。不知道是不是這二十年間在倉儲這塊有突破性的進展,不然應該不可能2020還犯了20年前提出的毛病。 A4 工廠裡面混亂的事情很多,你可以列出來,感覺你找到瓶頸處了哈哈。我對派貨不太熟,但題目確實要找瓶頸 跟解決方法,或許可以往那個方向去思考,找出瓶頸應該要看那些kpi(例如剛說的70趴),當kpi達到的時候,會用怎麼樣的建議調整派貨(或是加機台來解決)。可以反覆驗證(或是多Google看看有沒有其他數據輔助)滿確定數字怪的話,應該就是你找到瓶頸了。

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