# EGP Test Scenario ## Sequence ```sequence= 1. 1101 LDCM 2. 1105 CLAMP STATUS (TRUE:CLAMP,FALSE:NOT CLAMP, READ CARRIER ID) 3. 1104 CARRIER MAPPING 4. PP SELECT 5. START ------WAFER IN---- 6. 1107 CARRIER PROCESS START (FIRST WAFER IN) 7. 1109 WAFER PROCESS START (REMOVING THE WAFER FROM THE LP1 CARRIER) ------WAFER OUT---- 8. 1110 WAFER PROCESS END ----FINISH ALL WAFER PROCESSING----- 9. 1108 CARRIER PROCESS END //with wafer status 10. 1105 CLAMP STATUS (ON->OFF) 11. 1102 CARRIER MOVE OUT REQUEST (UDRQ) 12. 1103 CARRIER MOVE OUT COMPLETED (UDCM) 13. 1100 CARRIER MOVE IN REQUEST (LDRQ) ``` ### EQ Status CEID ```sequence= IDLE: 1001、1002、1003、1005、1006、1007 RUN: 1004 DOWN: 1008 ``` ### S1F13_EstablishCommunicationsRequest ```sequence EQ -> SECSLibrary_EGP.xml: S1F13 SECSLibrary_EGP.xml -> Event.xml: S1F13_EstablishCommunicationsRequest Event.xml -> S1F13_EstablishCommunicationsRequest.js: execute S1F13_EstablishCommunicationsRequest.js -> EQ : S1F14 ``` ### S6F11_1_OFFLINE ```sequence EQ -> SECSLibrary_EGP.xml: S6F11 CEID: 1 SECSLibrary_EGP.xml -> Event.xml: S6F11_1_OFFLINE Event.xml -> S6F11_1_OFFLINE.js: execute S6F11_1_OFFLINE.js -> EQ :S6F12 ``` ### S6F11_2_OnlineLOCAL ```sequence EQ -> SECSLibrary_EGP.xml: S6F11 CEID: 2 SECSLibrary_EGP.xml -> Event.xml: S6F11_2_OnlineLOCAL Event.xml -> S6F11_2_OnlineLOCAL.js: execute S6F11_2_OnlineLOCAL.js -> EQ :S6F12 ``` ### S6F11_3_OnlineREMOTE ```sequence EQ -> SECSLibrary_EGP.xml: S6F11 CEID: 3 SECSLibrary_EGP.xml -> Event.xml: S6F11_3_OnlineREMOTE Event.xml -> S6F11_3_OnlineREMOTE.js: execute S6F11_3_OnlineREMOTE.js -> EQ :S6F12 ``` ### S6F11_1101_LP1_CARRIER_MOVE_IN_COMPLETE (LotInfo LDCM) ```sequence EQ -> SECSLibrary_EGP.xml: S6F11,CEID=1101 and \n FormatMatch="true" SECSLibrary_EGP.xml -> Event.xml: S6F11_1101_LP1_CARRIER \n _MOVE_IN_COMPLETE Event.xml -> S6F11_1101_LP1_CARRIER_MOVE_IN_COMPLETE.js: execute S6F11_1101_LP1_CARRIER_MOVE_IN_COMPLETE.js -> EAPService: receiveTransaction() S6F11_1101_LP1_CARRIER_MOVE_IN_COMPLETE.js -> EAPService: reply(transactionS6F11) EAPService -> EQ: S6F12 S6F11_1101_LP1_CARRIER_MOVE_IN_COMPLETE.js -> MESService: mesPortStatusReportByBarcode(LDCM) MESService -> MES: PortStatusReport(LDCM) MES -> MESService: PortStatusReport_R S6F11_1101_LP1_CARRIER_MOVE_IN_COMPLETE.js -> MESService: mesLotInfoByCarrierNoSync(LotInfo) MESService -> MES: LotInfoByCarrierNoSync MES -> MESService: LotInfoByCarrierNoSync_R S6F11_1101_LP1_CARRIER_MOVE_IN_COMPLETE.js -> EAPService: catchLotInfoByPortID ``` ### S6F11_1002_EQ_STATUS_SETUP ### S6F11_1104_LP1_CARRIER_MAP ```sequence EQ -> SECSLibrary_EGP.xml: S6F11,CEID=1104 and \n FormatMatch="true" SECSLibrary_EGP.xml -> Event.xml: S6F11_1104_LP1 \n _CARRIER_MAP Event.xml -> S6F11_1104_LP1_CARRIER_MAP.js: execute S6F11_1104_LP1_CARRIER_MAP.js -> EAPService: receiveTransaction() S6F11_1104_LP1_CARRIER_MAP.js -> EAPService: reply(transactionS6F11) EAPService -> EQ: S6F12 S6F11_1104_LP1_CARRIER_MAP.js -> MESService: mesEQPStatusChange("IDLE") MESService -> MES: EQPStatusChange MES -> MESService: EQPStatusChange_R S6F11_1104_LP1_CARRIER_MAP.js -> EQ: S2F41_PP_SELECT S6F11_1104_LP1_CARRIER_MAP.js -> EQ: S2F41_START ``` ### S6F11_1004_EQ_STATUS_CYCLE ### S6F11_1107_LP1_CARRIER_PROCESS_START (LotInput INPR) ```sequence EQ -> SECSLibrary_EGP.xml: S6F11,CEID=1107 and \n FormatMatch="true" SECSLibrary_EGP.xml -> Event.xml: S6F11_1107_LP1_CARRIER \n _PROCESS_START.js Event.xml -> S6F11_1107_LP1_CARRIER_PROCESS_START.js: execute S6F11_1107_LP1_CARRIER_PROCESS_START.js -> EAPService: receiveTransaction() S6F11_1107_LP1_CARRIER_PROCESS_START.js -> EAPService: reply(transactionS6F11) EAPService -> EQ: S6F12 S6F11_1107_LP1_CARRIER_PROCESS_START.js -> MESService: mesEQPStatusChange("RUN") MESService -> MES: EQPStatusChange MES -> MESService: EQPStatusChange_R S6F11_1107_LP1_CARRIER_PROCESS_START.js -> MESService: mesLotInputSync MESService -> MES: LotInputSync MES -> MESService: LotInputSync_R S6F11_1107_LP1_CARRIER_PROCESS_START.js -> MESService: mesPortStatusReportByBarcode \n (INPR) MESService -> MES: PortStatusReport \n (INPR) MES -> MESService: PortStatusReport_R ``` ### S6F11_1110_LP1_WAFER_PROCESS_END (DataCollection) ```sequence EQ -> SECSLibrary_EGP.xml: S6F11,CEID=1110 and \n FormatMatch="true" SECSLibrary_EGP.xml -> Event.xml: S6F11_1110_LP1_WAFER_ \n PROCESS_END.js Event.xml -> S6F11_1110_LP1_WAFER_PROCESS_END.js: execute S6F11_1110_LP1_WAFER_PROCESS_END.js -> EAPService: receiveTransaction() S6F11_1110_LP1_WAFER_PROCESS_END.js -> EAPService: reply(transactionS6F11) EAPService -> EQ: S6F12 S6F11_1110_LP1_WAFER_PROCESS_END.js -> MESService: mesDataCollectionBySlot MESService -> MES: DataCollectionBySlot MES -> MESService: DataCollectionBySlot_R ``` ### S6F11_1001_EQ_STATUS_IDLE ### S6F11_1108_LP1_CARRIER_PROCESS_END (LotOutput) ```sequence EQ -> SECSLibrary_EGP.xml: S6F11,CEID=1108 and \n FormatMatch="true" SECSLibrary_EGP.xml -> Event.xml: S6F11_1108_LP1_ \n CARRIER_PROCESS_END.js Event.xml -> S6F11_1108_LP1_CARRIER_PROCESS_END.js: execute S6F11_1108_LP1_CARRIER_PROCESS_END.js -> EAPService: receiveTransaction() S6F11_1108_LP1_CARRIER_PROCESS_END.js -> EAPService: reply(transactionS6F11) EAPService -> EQ: S6F12 S6F11_1108_LP1_CARRIER_PROCESS_END.js -> MESService: mesEQPStatusChange("IDLE") MESService -> MES: EQPStatusChange MES -> MESService: EQPStatusChange_R S6F11_1108_LP1_CARRIER_PROCESS_END.js -> MESService: mesLotOutputSync MESService -> MES: LotOutputSync MES -> MESService: LotOutputSync_R ``` ### S6F11_1102_LP1_CARRIER_MOVE_OUT_REQUEST (UDRQ) ```sequence EQ -> SECSLibrary_EGP.xml: S6F11,CEID=1102 and \n FormatMatch="true" SECSLibrary_EGP.xml -> Event.xml: S6F11_1102_LP1_CARRIER \n _MOVE_OUT_REQUEST.js Event.xml -> S6F11_1102_LP1_CARRIER_MOVE_OUT_REQUEST.js: execute S6F11_1102_LP1_CARRIER_MOVE_OUT_REQUEST.js -> EAPService: receiveTransaction() S6F11_1102_LP1_CARRIER_MOVE_OUT_REQUEST.js -> EAPService: reply(transactionS6F11) EAPService -> EQ: S6F12 S6F11_1102_LP1_CARRIER_MOVE_OUT_REQUEST.js -> MESService: mesPortStatusReportByBarcode (UDRQ) MESService -> MES: PortStatusReport MES -> MESService: PortStatusReport_R ``` ### S6F11_1103_LP1_CARRIER_MOVE_OUT_COMPLETED (UDCM) ```sequence OP -> EQ: Take off \n carrier EQ -> SECSLibrary_EGP.xml: S6F11,CEID=1103 and \nFormatMatch="true" SECSLibrary_EGP.xml -> Event.xml: S6F11_1103_LP1_CARRIER \n _MOVE_OUT_COMPLETED.js Event.xml -> S6F11_1103_LP1_CARRIER_MOVE_OUT_COMPLETED.js: execute S6F11_1103_LP1_CARRIER_MOVE_OUT_COMPLETED.js -> EAPService: receiveTransaction() S6F11_1103_LP1_CARRIER_MOVE_OUT_COMPLETED.js -> EAPService: reply(transactionS6F11) EAPService -> EQ: S6F12 S6F11_1103_LP1_CARRIER_MOVE_OUT_COMPLETED.js -> MESService: mesPortStatusReportByBarcode \n (UDCM) MESService -> MES: PortStatusReport \n (UDCM) MES -> MESService: PortStatusReport_R ``` ### S6F11_1100_LP1_CARRIER_MOVE_IN_REQUEST (LDRQ) ```sequence EQ -> SECSLibrary_EGP.xml: S6F11,CEID=1100 and \nFormatMatch="true" SECSLibrary_EGP.xml -> Event.xml: S6F11_1100_LP1_CARRIER \n _MOVE_IN_REQUEST.js Event.xml -> S6F11_1100_LP1_CARRIER_MOVE_IN_REQUEST.js: execute S6F11_1100_LP1_CARRIER_MOVE_IN_REQUEST.js -> EAPService: receiveTransaction() S6F11_1100_LP1_CARRIER_MOVE_IN_REQUEST.js -> EAPService: reply(transactionS6F11) EAPService -> EQ: S6F12 S6F11_1100_LP1_CARRIER_MOVE_IN_REQUEST.js -> MESService: mesPortStatusReportByBarcode \n (LDRQ) MESService -> MES: PortStatusReport \n (LDRQ) MES -> MESService: PortStatusReport_R S6F11_1100_LP1_CARRIER_MOVE_IN_REQUEST.js -> EAPService: catchLotInfoByPortID(null) ``` ### S5F1_AlarmReportSend ```sequence EQ -> SECSLibrary_EGP.xml: S5F1 SECSLibrary_EGP.xml -> Event.xml : S5F1_AlarmReport Event.xml -> S5F1_AlarmReportSend.js : execute S5F1_AlarmReportSend.js -> EAP: Receive_S5F1_AlarmReportSend EAP -> EQ: S5F2 ```