# Semiconductor_Mos Capator * # Three cases at semiconductor surface ### When I=0, dE/dx =0,i.e.,Fermi level is flat: | Accumulation case |Depletion case| Inversion case | | -------------- | -------------- | ----------------- | | ![](https://i.imgur.com/G7hlvcb.png)|![](https://i.imgur.com/iRTw2BG.png)|![](https://i.imgur.com/XmupWXe.png)| | ![](https://i.imgur.com/1HUU3hN.png)| ![](https://i.imgur.com/iCJneHS.png)| ![](https://i.imgur.com/9nrAjc0.png)| --- * # Surface Depletion Region * ### The figure shows the energy band diagram at surface of a p-type semiconductor. ![](https://i.imgur.com/FRpVIlI.png) ![](https://i.imgur.com/JDf62Zh.png) ![](https://i.imgur.com/XDTQ7s3.png) --- * # Charge in the semicinductir versus applied voltage ![](https://i.imgur.com/qkZo2n9.png) ![](https://i.imgur.com/0P3eKhX.png) --- * # Maximum depletion width ![](https://i.imgur.com/D1KXGQI.png) ![](https://i.imgur.com/VKWjW2j.png) --- * # Ideal MOS curve ![](https://i.imgur.com/Z2SzPpJ.png) ![](https://i.imgur.com/t2GAyn1.png) ![](https://i.imgur.com/MrwMRqD.png) ![](https://i.imgur.com/pksZzCa.png) ![](https://i.imgur.com/ARCoAwg.png) ![](https://i.imgur.com/KNpQFlp.png) ![](https://i.imgur.com/JWZPlRj.png) --- * # SiO2-Si MOS capacitor ![](https://i.imgur.com/U9GS0hc.png) ![](https://i.imgur.com/4FJ5H63.png) ![](https://i.imgur.com/Nd41GE6.png) ![](https://i.imgur.com/Z0VPB1p.png) ![](https://i.imgur.com/Kd220Qm.png) ![](https://i.imgur.com/0dHlzQv.png) ![](https://i.imgur.com/QeTEH2Y.png) ![](https://i.imgur.com/1iwfz2W.png) ![](https://i.imgur.com/SxEAzEr.png) --- # Summary Of MOS Capacitor * ### At the SiO2 interface, there are "3 possible charge distribution": | Accumulation|Depletion| Inversion | | -------------- | -------------- | ----------------- | | ![](https://i.imgur.com/G7hlvcb.png)|![](https://i.imgur.com/iRTw2BG.png)|![](https://i.imgur.com/XmupWXe.png)| ### The inversion is most important distribution, because it relates to the conducting channel for MOSFET operation. * ### We have considered the characteristics of an ideal MOS capacitor. For a practical silicon MOS capacitor,the work function difference is generally not zero and there are various charges in the oxide or at the SiO2-Si interface that will affect the ideal MOS characteristics. * ### Tunneling is the most important conduction process in SiO2. Tunneling current will generate defects in SiO2.When defects become dense enugh to form a continuous chain connecting the gate to the channel, catastrophic breakdown will occur.