---
# System prepended metadata

title: CIS 教育訓練筆記
tags: [CIS]

---

# [CIS](https://hackmd.io/5rB4pbC0TwCPVn9p1Uc3Ug?view)

 ##  CIS 廠務
 - [廠務設備介紹](https://hackmd.io/@003/FactoryAffairs)
 ## 手工具介紹
 - [手工具介紹](https://hackmd.io/@003/HandTools)
 ##  ASP 機電系統
 - [供電系統](https://hackmd.io/@003/power)
 - [機櫃機版介紹](https://hackmd.io/@003/Cabinet)
     - [chamber C INFTERFACE](https://hackmd.io/@003/chamberCINFTERFACE)
 ##  [ASP人機介面](https://hackmd.io/@003/ctrl)
 -   [System](https://hackmd.io/@003/system)
     -   [Control System](https://hackmd.io/@003/ControlSystem)
     -   [Enter Lot Names for](https://hackmd.io/@003/enterlotnamesfor)
     -   [Monitor Interlocks](https://hackmd.io/@003/monitorinterlocks)
 -   [Program 程式設定清單](https://hackmd.io/@003/Program)
     - [Wafer Sequencing](https://hackmd.io/@003/WS)
     - [Process Programs](https://hackmd.io/@003/PP)
 - [Misc 雜項設定清單](https://hackmd.io/@003/Misc)
     - [System Configuration](https://hackmd.io/@003/sysconfig)
        - [Configure System #1](https://hackmd.io/@003/configuresystem)
            - [Vacuum Sensors](https://hackmd.io/@003/VacuumSensors)
            - [Wafer Sensor](https://hackmd.io/@003/wafersensor)
            - [Futre Configure](https://hackmd.io/@003/futreconfigure)
        - [Configure System #2](https://hackmd.io/@003/ConfigureSystem2)
            - [Robot Options](https://hackmd.io/@003/robotopt) 
    - [System Constants](https://hackmd.io/@003/Actuationtimes)
        - [General System Constants](https://hackmd.io/@003/Generalsyscon)
    - [Monitor](https://hackmd.io/@003/monitor)
    - [Vacuum Service Scrnne](https://hackmd.io/@003/VSS)
 - [Wafer 選單](https://hackmd.io/@003/Wafer)
    - [1. Monitor Wafer Screen（監控晶圓畫面）](https://hackmd.io/@003/MW)
        - [晶圓控製操作介紹](https://hackmd.io/@003/WaferControl)
    - [2. Monitor Handler Control Screen（機械手臂控制）](https://hackmd.io/@003/MHC)
        - [手動控制畫面](https://hackmd.io/@003/Devicelocation)
        - [home all robot axes 歸零作業](https://hackmd.io/@003/dohome)
        - [Extension 及 Rotation 控制區](https://hackmd.io/@003/monitorwafers)
        - [Cass Elevator](https://hackmd.io/@003/CassElevator)
        - [Slit 控制區](https://hackmd.io/@003/ROBOT)
        - [B/Robot Calib](https://hackmd.io/@003/BRobotCalib)
    - [3. Handler Maintenance Control Screen（搬送機維護控制畫面）](https://hackmd.io/@003/HMC)
        - [Rate of Rise (RR 測漏模式)](https://hackmd.io/@003/RR)
        - [Chamber Vent](https://hackmd.io/@003/chambervent)
        - [Abort buff chamber Program](https://hackmd.io/@003/chamberprogram)
    - [4. Load/unload](https://hackmd.io/@003/loadunload)
    
---
 ## [Wafer online](https://hackmd.io/@003/Waferonline)
 - [online 前置準備](https://hackmd.io/@003/OnlinePre-preparation) 
 - [開啟人機氣閥及將PUMP設定ONLINE](https://hackmd.io/@003/ONLINEPUMP)
 - [RUN (GO)](https://hackmd.io/@003/rungo)

 ## [Wafer offline 流程](https://hackmd.io/@003/ffline)
 - [STOP Button 系統停止](https://hackmd.io/@003/stopbutton)
 - [Abort Sequencen](https://hackmd.io/@003/Abortsequencen)
 - [將晶圓放回 LOADLOCKS](https://hackmd.io/@003/cassetteback)
 - [關閉人機氣閥及PUMP並將Chamber Offline](https://hackmd.io/@003/turnoffpump)
 - [關閉 Dry Pump](https://hackmd.io/@003/turnoffbutter)
        
 ## [chamber C](https://hackmd.io/@003/chamberc)
 - [Chamber C 工作畫面](https://hackmd.io/@003/chambercwork)
 - [Chamber C Servic Screen](https://hackmd.io/@003/chadmbercservicscreen)
 - [線路接法](https://hackmd.io/@003/chambercli)
 - [Leak up 前置作業](https://hackmd.io/@003/leakupbefor)
 - [Leak up](https://hackmd.io/@003/Leakup)
 ## Chamber B
 - [Chamber B Service Screen](https://hackmd.io/@003/ChamberBServiceScreen)
 - [Cathode](https://hackmd.io/@003/etch)
 - [Vent](https://hackmd.io/@003/Vent)
    
 ## chamber F
 - [Orienter](https://hackmd.io/@003/Orienter)
 ## PM流程
 - [Chamber B PM](https://hackmd.io/@003/ChamberBPM)
 ## 電路圖
 - [Chamber PWR DIST](https://hackmd.io/@003/ChamberPWRDIST)
 - [DPS Metal Etch Chamber](https://hackmd.io/@003/CircuitDiagram)
 - [Mainframe](https://hackmd.io/@003/explain)